ø16mm XA Series ø22mm XW Series SEMI S2 Compliant EMO Switches and Switch Guards Same dimensions for any number of contacts Same dimensions for any number of contacts ø16mm XA Series / ø22mm XW Series SEMI Emergency Off (EMO) Switches New XA and XW series emergency stop switches are now available with EMO markings. When used in combination with switch guards ensures compliance to SEMI S2 standards. < Structure and Features > ø16mm XA Series ø22mm XW Series W World's orld's World's World's Up to four contacts Shortest for four-contact type Shortest Shortest First First Only 27.9 mm deep behind the Only 48.7 mm deep behind panel for any number of contacts the panel for any number of contacts, reducing space. 48.7 mm 27.9 mm Safe Break Action Safety Potential Structure 3rd-generation 2nd-generation W World's orld's (Safety Potential Structure) When the contact block is detached from the First First operator, the NC contact opens (OFF). Normal Status Latched Normal Status Latched Detaching the Contact Block 123 4 Operator NC NC contacts: NC NC contacts: contacts: OFF contacts: OFF ON ON (machine (machine (machine cannot (machine can operate) cannot operate) can Contact operate) operate) Block Closed ON Open (OFF) When the contact block is detached from the operator, the cam directly opens the NC main contacts (contacts are off). Direct Opening Action All normally closed contact elements of an emergency stop devices shall have Normal Status Latched Normal Status Latched a direct opening action (positive opening action), according to annex K of IEC 60947-5-1. (IEC 60947-5-5; 5.2) NC contacts: NC contacts: OFF Achievement of contact separation (of a contact element) of the switch actuator ON (machine (machine cannot through non-resilient members (for example not dependent upon springs) (IEC can operate) operate) 60947-5-1; Annex K) With the XA and XW emergency stop switches, the potential energy level of the Safety Lock Mechanism latched status is lower than that of the normal status. In the event the contact block is damaged due to excessive shocks, the NC contacts will turn off, thus leading to safety The emergency stop signal shall be maintained until the emergency stop device by stopping the machine. is reset (disengaged). (IEC 60947-5-5; 6.2) 2 Energy Low High Energy Low High SEMI S2 Compliant Switches / Switch Guards The combination of EMO switch and switch guard can be used with the FB series control boxes. For details, see the FB XA Series XW Series XW Series + + + series control box catalog XA9Z-KG1 HW9Z-KG3 HW9Z-KG4 (EP1132). The combination of IDEC’s EMO switch guards and emergency stop switches are approved by TÜV Rheinland for compliance with SEMI S2 standards. XA9Z-KG1 HW9Z-KG3 HW9Z-KG4 1 45 6 10 11 12 13 2 3 78 9 14 15 17 16 SEMI S2-compliant Combinations EMO Switch Guard Applicable Emergency Stop Switches XA9Z-KG1 1 : XA1E-BV4∗∗∗∗-EMO; : 2 XA1E-BV3, XA1E-LV3; : 3 XA1E-BV4, XA1E-LV4 HW9Z-KG3 4 : XW1E-BV4∗∗∗∗-EMO; : 5 XW1E-BV4, XW1E-LV4, XW1E-TV4; : 6 HW1B-V3; : 7 HW1B-V4; : 8 HW1B-X4; : 9 HW1B-Y2 10: XW1E-BV4∗∗∗∗-EMO; : 11 XW1E-BV4, XW1E-LV4, XW1E-TV4; : 12 XW1E-BV5; : 13 HW1B-V3; : 14 HW1B-V4; HW9Z-KG4 15 16 17 : HW1E-BV4, HW1B-LV4; : HW1B-X4; : HW1B-Y2 Note: Numbers in the circle refer to the pictures of the corresponding control units shown above. About SEMI SEMI is an international industry association whose member companies produce materials, equipment, and related technology for manufacturing semiconductor, flat panel display (FPD), and micro-electromechanical systems (MEMS) products. The SEMI safety guideline was published for the semiconductor industry and it is observed with the same importance as standards. SEMI S2-0706, 12.1 describes as follows; “The equipment should have an ‘emergency off’ (EMO) circuit. The EMO actuator (e.g., button), when activated, should place the equipment into a safe shutdown condition, without generating any additional hazard to per- sonnel or the facility.” Because the semiconductor environment involves solvents and chemicals in many cases, some of which are toxic, interrupting the power source may cause secondary accidents. SEMI safety guideline requires the installation of an emergency off switch which disconnects only the part responsible for the hazardous situation, and maintains the functions of safety-related devices (e.g., smoke detectors, gas/water leak detectors, pressure measurement devices, etc.). Emergency off buttons should be located or guarded to minimize accidental activation (SEMI S2-0706, 12.5.1). The emergency off button should be red and mushroom shaped. A yellow background for the EMO should be provided (SEMI S2-0706, 12.3). • Location of EMO switches on semiconductor manufacturing equipment Acceptance criteria: controls should not be located above 1638 mm (64.5 in.) or below 838 mm (33 in.) (SEMI S8-0705, 9.1.2). 1638 mm • No operation or regularly scheduled maintenance location should require maximum more than 3 m (10 feet) travel to an EMO button (S2-0706, 12.5.2). 838 mm (3 m maximum) (3 m maximum) minimum EMO button Operator EMO button 3 +0.2 ø16.2 0 ø16 XA Series SEMI EMO Switches ø16mm XA Series EMO Switches The World’s First ø16 mm, 4-contact Emergency Stop Switch. Compact size—only 27.9 mm deep behind the panel. • Lead-free, RoHS compliant. • The depth behind the panel is only 27.9 mm for 1 to 4 contacts. • IDEC’s original “Safe break action” ensures that the contacts open when the contact block is detached from the operator. • 1 to 4NC main contacts and 1NO monitor contact • Push-to-lock, Pull or Turn-to-reset operator • Direct opening action mechanism (IEC60947-5-5, 5.2, IEC60947-5-1, Annex K) • Safety lock mechanism (IEC60947-5-5, 6.2) • Degree of protection IP65 (IEC60529) Types Description NC Main Contact NO Monitor Contact Ordering Type No. 1NC – XA1E-BV401-RH-EMO 2NC – XA1E-BV402-RH-EMO 3NC – XA1E-BV403-RH-EMO ø40mm Mushroom 4NC – XA1E-BV404-RH-EMO 1NC 1NO XA1E-BV411-RH-EMO 2NC 1NO XA1E-BV412-RH-EMO 3NC 1NO XA1E-BV413-RH-EMO • Button color is bright red (RH). • For detailed specifications and operation of emergency stop switches, see a separate catalog for the XA/XW emergency stop switches (EP1050). Contact Ratings (NC main contacts/NO monitor contact) Rated Insulation Voltage (Ui) 300V Rated Current (Ith) 5A Rated Operating Voltage (Ue) 30V 125V 250V Resistive Load (AC-12) – 3A 3A AC 50/60 Hz Inductive Load (AC-15) – 1.5A 1.5A Main Contacts Resistive Load (DC-12) 2A 0.4A 0.2A DC Inductive Load (DC-13) 1A 0.22A 0.1A Rated Operating Current Resistive Load (AC-12) – 1.2A 0.6A AC 50/60 Hz Inductive Load (AC-14) – 0.6A 0.3A Monitor Contacts Resistive Load (DC-12) 2A 0.4A 0.2A DC Inductive Load (DC-13) 1A 0.22A 0.1A • Minimum applicable load: 5V AC/DC, 1 mA (reference value) (Operating area may vary according to the operating conditions and load types.) • The rated operating currents are measured at resistive/inductive load types specified in JIS C8201-5-1. Dimensions Panel Thickness 0.5 to 3.7 +0.2 1.7 0 Panel Cut-out Terminal Cover Rubber Gasket XA9Z-VL2 Locking Ring 2.1 25.8 20.6 30.4 All dimensions in mm. Solder Terminal Type 4 ø40 ø29.8 30.4 27.2 19.8 8.7 21 +0.2 17.9 0 R0.8 max. R0.8 max. +0.4 ø22.3 0 +0.4 ø22.3 0 ø22 XW Series SEMI EMO Switches ø22mm XW Series EMO Switches ø22 mm, 4-contact Emergency Stop Switch. Compact size—only 48.7 mm deep behind the panel. • Lead-free, RoHS compliant. • The depth behind the panel is only 48.7 mm for 1 to 4 contacts • IDEC’s original “Safe break action” ensures that the contacts open when the contact block is detached from the operator. • 1 to 4NC main contacts and 1 or 2NO monitor contacts • Push-to-lock, Pull or Turn-to-reset operator • Direct opening action mechanism (IEC60947-5-5, 5.2, IEC60947-5-1, Annex K) • Safety lock mechanism (IEC60947-5-5, 6.2) • Fingersafe screw terminal accessory available (IP20) • Degree of protection IP65 (IEC60529) • UL, c-UL approved. EN compliant Types Ordering Type No. Description and Appearance NC Main Contact NO Monitor Contact w/Terminal Cover 1NC – XW1E-BV401M-RH-EMO 2NC – XW1E-BV402M-RH-EMO 3NC – XW1E-BV403M-RH-EMO 4NC – XW1E-BV404M-RH-EMO ø40mm Mushroom 1NC 1NO XW1E-BV411M-RH-EMO 2NC 1NO XW1E-BV412M-RH-EMO 3NC 1NO XW1E-BV413M-RH-EMO 2NC 2NO XW1E-BV422M-RH-EMO • Button color is bright red (RH). • For detailed specifications and operation of emergency stop switches, see a separate catalog for the XA/XW emergency stop switches (EP1050). Contact Ratings (NC main contacts/NO monitor contact) Rated Insulation Voltage (Ui) 250V Rated Current (Ith) 5A Rated Operating Voltage (Ue) 30V 125V 250V Resistive Load (AC-12) – 5A 3A AC 50/60 Hz Inductive Load (AC-15) – 3A 1.5A Main Contacts Resistive Load (DC-12) 2A 0.4A 0.2A DC Inductive Load (DC-13) 1A 0.22A 0.1A Rated Operating Current Resistive Load (AC-12) – 1.2A 0.6A AC 50/60 Hz Inductive Load (AC-14) – 0.6A 0.3A Monitor Contacts Resistive Load (DC-12) 2A 0.4A 0.2A DC Inductive Load (DC-13) 1A 0.22A 0.1A • Minimum applicable load: 5V AC/DC, 1 mA (reference value) (Operating area may vary according to the operating conditions and load types.) • The rated operating currents are measured at resistive/inductive load types specified in JIS C8201-5-1. Dimensions IP20 Fingersafe Terminal With Terminal Cover +0.2 +0.2 0.5 0.5 3.2 3.2 0 0 Panel Cut-out Panel Cut-out 47.2 47.2 48.7 32.2 48.7 32.2 M3 Terminal Screw Rubber Gasket M3 Terminal Screw Rubber Gasket 18.5 20.1 18.5 20.1 Terminal Cover Locking Ring Terminal Cover Locking Ring All dimensions in mm. XW9Z-VL2MF Panel Thickness 0.8 to 6 XW9Z-VL2M Panel Thickness 0.8 to 6 5 ø40 ø40 37 21 +0.4 24.1 0 37 21 +0.4 24.1 0 ø22 ø22.2 ø22 ø22 ø16 SEMI EMO Switch Guards Types Series Description & Appearance Type No. Specifications Dimensions (mm) EMO Switch Guard SEMI S2 compliant (Note 1) 23.1 19.1 ø16mm XA XA9Z-KG1 42 EMO Switch Guard SEMI S2 compliant (Note 2) 38 64 22 47 HW9Z-KG1 (Note 5) EMO Switch Guard SEMI S2 compliant (Note 1) 36.5 SEMATECH compliant (Note 3) HW9Z-KG2 Polyamide (PA6) Color: Yellow, Munsell 2.5Y8/10 equivalent (Note 5) Degree of protection: IP65 (Note 4) ø22mm HW/XW EMO Switch Guard SEMI S2 compliant (Note 1) 35 25 HW9Z-KG3 42 EMO Switch Guard 35 SEMI S2 compliant (Note 1) 25 SEMATECH compliant (Note 3) HW9Z-KG4 50 Note 1: The combination of IDEC’s emergency stop switches and EMO switch guards are approved by TÜV Rheinland for compliance with SEMI S2 standard. Note 2: SEMI S2-0703, 12.5.1 compliant. Note 3: SEMATECH Application Guide for SEMI S2-93, 12.4. compliant. Note 4: Degree of protection IP65 applies to the combination of an emergency stop switch and an EMO switch guard. Note 5: HW9Z-KG1, HW9Z-KG2, and HW9Z-KG3 can be used with ø29mm or ø40mm mushroom buttons. ø60mm jumbo mushroom buttons cannot be installed. Note: EMO switch guards have been designed for applications in semiconductor manufacturing equipment only. Do not use EMO switch guards with emergency stop switches which are installed on machine tools or food processing machines. (Machinery Directive of the European Commission and IEC 60204-1 require that emergency stop switches be installed in a readily accessible area, and the usage of switch guards is not permitted.) 6 ø51 ø75 ø66 ø66.8 52 36 67 ø76.1 32 ø74 ø90 ø57 ø90 ø80 +0.2 0 ø16.2 LOCK SEMI EMO Switch Guards Accessories: Terminal Covers Model Description Part Numbers Terminal Cover for contact block XW9Z-VL2M IP20 Fingersafe Cover XW9Z-VL2MF Panel Cut-out • • • • ø16 mm • • • • ø22 mm +0.2 ∗3.2 0 +0.2 ∗1.7 0 Projection Projection +0.2 The ∗1.7 recess is for preventing rotation and not necessary 0 when anti-rotation is not used. +0.2 The ∗3.2 recess is for preventing rotation and not necessary 0 when anti-rotation is not used. When anti-rotation is not required or when the panel cut-out does not have anti-rotation recess, remove the projection using pliers. Installation • • • • ø16 mm • • • • ø22 mm TOP Marking TOP Marking TOP Marking TOP Marking Locking Ring Locking Ring Operator Button Operator Button Panel Thickness: 1 to 2.2 Panel Thickness: 1.2 to 4 To tighten the locking ring, use locking ring wrench MT-100 To tighten the locking ring, use locking ring wrench MW9Z-T1 and tighten to a torque of 0.88 N·m. and tighten to a torque of 2.0 N·m. All dimensions in mm. EMO Sticker Type No.: HW9Z-EMO-NPP Color: Yellow (red legend) 50 Package Quantity: 10 EMO Dimensions Lock Lever Locking Ring 49.4 29.4 1 contact block 2 contact blocks 13 (1 or 2 blocks) 4 contact blocks 69.4 (4 blocks) 32 All dimensions in mm. 7 +0.4 0 R0.8 maximum ø22.3 ø40 +0.2 17.9 0 20 26.5 25 20 41.4 +0.4 24.1 0 ø16mm XA Series / ø22mm XW Series Emergency Stop Switches ø16mm XA Series The world’s first ø16mm, 4-contact emergency stop switch— only 27.9mm deep behind the panel. • Contact: Main 1NC to 4NC, Monitor 1NO • Rated Operating Current: Main contacts AC: 250V, 3A (resistive load) DC: 250V, 0.2A (resistive load) Monitor contacts AC: 250V, 0.6A (resistive load) DC: 250V, 0.2A (resistive load) • Illumination Ratings: 24V AC/DC, 11 mA ø22mm XW Series The world’s first ø22mm, 4-contact emergency stop switch— only 48.7 mm deep behind the panel. • Contact: Main 1NC to 4NC, Monitor 1NO to 2NO • Rated Operating Current: Main contacts AC: 250V, 3A (resistive load) DC: 250V, 0.2A (resistive load) Monitor contacts AC: 250V, 0.6A (resistive load) DC: 250V, 0.2A (resistive load) • Illumination Ratings: 24V AC/DC, 15 mA LW Series Flush Silhouette Switches Flush bezel projects only 2 mm from front of the panel. ø28mm round and 28mm square black plastic bezels. Round metal bezels are also available. • ø25.3mm round panel cut-out, 24.5mm square panel cut-out. • Collective mounting is possible. • Separate type control units with a locking lever enable easy installation even when mounted collectively. • Gold-clad silver or silver contacts. • IP65 protection (IEC 60529) • UL recognized and CSA certified. EN compliant. Specifications and other descriptions in this catalog are subject to change without notice. 7-31, Nishi-Miyahara 1-Chome, Yodogawa-ku, Osaka 532-8550, Japan Tel: +81-6-6398-2571, Fax: +81-6-6392-9731 E-mail: products@idec.co.jp IDEC IZUMI (H.K.) CO., LTD. IDEC CORPORATION (USA) IDEC ELEKTROTECHNIK GmbH Unit 1505-07, DCH Commercial Centre No. 25, 1175 Elko Drive, Sunnyvale, CA 94089-2209, USA Wendenstrasse 331, 20537 Hamburg, Germany Tel: +1-408-747-0550 / (800) 262-IDEC (4332) Tel: +49-40-25 30 54 - 0, Fax: +49-40-25 30 54 - 24 Westlands Road, Quarry Bay, Hong Kong Fax: +1-408-744-9055 / (800) 635-6246 E-mail: service@idec.de Tel: +852-2803-8989, Fax: +852-2565-0171 E-mail: info@hk.idec.com E-mail: opencontact@idec.com IDEC (SHANGHAI) CORPORATION Room 608-609, 6F, Gangtai Plaza, No. 700, IDEC TAIWAN CORPORATION IDEC CANADA LIMITED Yan'an East Road, Shanghai 200001, PRC 8F-1, No. 79, Hsin Tai Wu Road, Sec. 1, Unit 22-151, Brunel Road, Mississauga, Ontario, Hsi-Chih, Taipei County, Taiwan L4Z 1X3, Canada Tel: +86-21-5353-1000, Fax: +86-21-5353-1263 Tel: +1-905-890-8561, Toll Free: (888) 317-4332 E-mail: idec@cn.idec.com Tel: +886-2-2698-3929, Fax: +886-2-2698-3931 Fax: +1-905-890-8562 E-mail: service@tw.idec.com IDEC (BEIJING) CORPORATION E-mail: sales@ca.idec.com Room 211B, Tower B, The Grand Pacific Building, IDEC IZUMI ASIA PTE. LTD. IDEC AUSTRALIA PTY. LTD. 8A Guanghua Road, Chaoyang District, No. 31, Tannery Lane #05-01, Dragon Land Beijing 100026, PRC Building, Singapore 347788 2/3 Macro Court, Rowville, Victoria 3178, Australia Tel: +65-6746-1155, Fax: +65-6844-5995 Tel: +61-3-9763-3244, Toll Free: 1800-68-4332 Tel: +86-10-6581-6131, Fax: +86-10-6581-5119 E-mail: info@sg.idec.com Fax: +61-3-9763-3255 IDEC (SHENZHEN) CORPORATION E-mail: sales@au.idec.com Unit AB-3B2, Tian Xiang Building, Tian’an Cyber Park, IDEC ELECTRONICS LIMITED Fu Tian District, Shenzhen, Guang Dong 518040, PRC Unit 2, Beechwood, Chineham Business Park, Tel: +86-755-8356-2977, Fax: +86-755-8356-2944 Basingstoke, Hampshire RG24 8WA, UK Tel: +44-1256-321000, Fax: +44-1256-327755 www.idec.com E-mail: sales@uk.idec.com Cat. No. XS9Y-DS200-0 (Revised in USA 01/09 - PDF only)